Blank Cover Image

PROCESS CONTROL FOR A RAPID OPTICAL ANNEALING SYSTEM

著者名:
掲載資料名:
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
52
発行年:
1985
開始ページ:
199
終了ページ:
208
総ページ数:
10
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837173 [0931837170]
言語:
英語
請求記号:
M23500/52
資料種別:
国際会議録

類似資料:

1 国際会議録 OXIDE GROWTH USING THE WATER-WALL ARC LAMP

Gelpey, J.C., Stump, P.O., Capodilupo, R.A.

Materials Research Society
7 国際会議録 RAPID THERMAL ANNEALING OF SILICON USING AN ULTRAHIGH POWER ARC LAMP

Hodson, R. T., Baglin, J. E. E.., Michel, A. E., Mader, S., Gelpey, J. C.

North-Holland
2 国際会議録 An Overview of ms Annealing for Deep Sub-Micron Activation

J.C. Gelpey, S. McCoy, D. Camm, W. Lerch

Trans Tech Publications
8 国際会議録 IMPROVING THE STRUCTURAL AND ELECTRICAL PROPERTIES OF EPITAXIAL CaF2 ON Si BY RAPID THERMAL ANNEALING

Phillips, J.M., Manger, M.L., Pfeiffer, L., Joy, D.C., Smith III, T.P., Augustyniak, W.M., West, K.W.

Materials Research Society
3 国際会議録 ANNEALING KINETICS DURING RAPID AND CLASSICAL THERMAL PROCESSING OF LASER AND IMPLANTATION INDUCED DEFECTS IN SILICON

Adekoya, W.O., Muller, J.C., Siffert, P.

Materials Research Society
9 国際会議録 GAS FLOW ENGINEERING IN RAPID THERMAL PROCESSING

Nenyei, Z., Sommer, H., Gelpey, J., Bauer, A.

MRS - Materials Research Society
4 国際会議録 RAPID THERMAL ANNEALING OF ION IMPLANTED p-n JUNCTIONS IN SILICON

Ho, C.C., Kwor, R., Araujo, C., Gelpey, J.

Materials Research Society
10 国際会議録 Advanced Annealing for Sub-130 nm Junction Formation

Gelpey, J.C., Elliott, K., Gamin, D., McCoy, S., Ross, J., Downey, D.F., Arevalo, E.A.

Electrochemical Society
5 国際会議録 Advanced Process Control Expert System of CVD Membrane Thickness Based on Neural Network

Chang, M., Chen, J.C., Chang, J.W., Heh, J.S.

Trans Tech Publications
11 国際会議録 Formation of Shear Texture and Ultra-Fine Grains during Equal Angular Channel Rolling and Subsequent Annealing in AA 3003 Sheet

Huh, M.Y., Lee, J.P., Lee, J.C., Park, J.W., Chung, Y.H.

Trans Tech Publications
6 国際会議録 RAPID THERMAL PROCESSING OF SILICON ION IMPLANTED CHANNEL LAYERS IN GaAs

Hara, Tohru, Gelpey, Jeffrey C.

Materials Research Society
12 国際会議録 RAPID THERMAL PROCESSING OF MULTIPLE LOW DOSE OXYGEN IMPLANTATIONS FOR SIMOX

Blake, J., Gelpey, J. C., Lee, D. M., Rowland, L., Rozgonyi, G. A.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12