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CHARACTERIZATION OF EPITAXIAL CoSi2 FILMS GROWN ON Si

著者名:
掲載資料名:
Advanced photon and particle techniques for the characterization of defects in solids : symposium held November 27-29, 1984, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
41
発行年:
1985
開始ページ:
355
終了ページ:
362
総ページ数:
8
出版情報:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9780931837067 [0931837065]
言語:
英語
請求記号:
M23500/41
資料種別:
国際会議録

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