HIGH RESOLUTION Z-CONTRAST IMAGING AND LATTICE LOCATION ANALYSIS OF DOPANTS IN ION-IMPLANTED SILICON

HIGH RESOLUTION Z-CONTRAST IMAGING AND LATTICE LOCATION ANALYSIS OF DOPANTS IN ION-IMPLANTED SILICON

著者名:

掲載資料名:

Advanced photon and particle techniques for the characterization of defects in solids : symposium held November 27-29, 1984, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

41

発行年:

1985

開始ページ:

287

終了ページ:

294

総ページ数:

8

出版情報:

Pittsburgh: Materials Research Society

ISSN:

02729172

ISBN:

9780931837067 [0931837065]

言語:

英語

請求記号:

M23500/41

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015532
シリーズID:	PA00000011
会議名:	Symposium on advanced photon and particle techniques for the characterization of defects in solids
回次:	1984
会議開催地:	Boston, MA, USA
会議開催年:	1984.11.29-1984.11.30

類似資料:

1 国際会議録 TRANSIENT ENHANCED DIFFUSION AND GETTERING OF DOPANTS IN ION IMPLANTED SILICON Pennycook, S. J., Narayan, J., Culbertson, R. J. Materials Research Society	7 国際会議録 CHARACTERIZATION AND EVOLUTION OF MICROSTRUCTURES FORMED BY HIGH DOSE OXYGEN IMPLANTATION OF SILICON El-Ghor, M.K., Pennycook, S.J., Sjoreen, T.P., Narayan, J. Materials Research Society
2 国際会議録 Dopant. Site Location by Electron Channeling in Ion Implabted Silicon Pennycook, S. J., Narayan, J., Holland, O. W. North-Holland	8 国際会議録 COHERENT PRECIPITATE FORMATION IN PULSED-LASER AND THERMALLY ANNEALED, ION-IMPLANTED Si Appleton, B. R.., Narayan, J., Holland,. O, W.,, Pennycook, S. J. North-Holland
3 国際会議録 TRAPPING OF INTERSTITIALS DURING ION IMPLANTATION IN SILICON Culbertson, R.J., Pennycook, S.J. Materials Research Society	9 国際会議録 SIMULATION AND QUANTIFICATION OF HIGH-RESOLUTION E-CONTRAST IMAGING OF SEMICONDUCTOR INTERFACES Jesson, D.E., Pennycook, S.J., Chisholm, M.F. Materials Research Society
4 国際会議録 PRECIPITATION, PHASE TRANSFORMATION, AND ENHANCED DIFFUSION IN ION-IMPLANTED SILICON Pennycook, S. J., Culbertson, R. J., Berger, S. D. Materials Research Society	10 国際会議録 DIFFUSION, SEGREGATION, AND RECRYSTALLIZATION IN HIGH-DOSE ION-IMPLANTED Si Pennycook, S. J. Materials Research Society
5 国際会議録 FORMATION OF STABLE POINT DEFECTS IN ION-IMPLANTED Si Culbertson, R.J., Pennycook, S.J. Materials Research Society	11 国際会議録 INCOHERENT IMAGING BY Z-CONTRAST STEM: TOWARDS 1 A RESOLUTION Pennycook, S. J., Jesson, D. E., McgGibbon, A. J. MRS - Materials Research Society
6 国際会議録 TRANSIENT ENHANCED DIFFUSION IN B+ AND P+ IMPLANTED SILICON Pennycook, S.J., Culbertson, R.J. Materials Research Society	12 国際会議録 Lattice Location of Ion Implanted Dopants in GaAs Using Radioactive Probes Winter,S., Biasser,S., Hofsass,H., Jahn,S., Lindner,G., Recknagel,E. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12