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CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY OF DEFECTS IN BETA SILICON CARBIDE THIN FILMS

著者名:
Carter Jr., C. H.
Edmond, J. A.
Palmour, J. W.
Ryu, J.
Kim, H. J.
Davis, R. F.
さらに 1 件
掲載資料名:
Microscopic identification of electronic defects in semiconductors : symposium held April 15-18, 1985, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
46
発行年:
1985
開始ページ:
593
終了ページ:
598
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837111 [0931837111]
言語:
英語
請求記号:
M23500/46
資料種別:
国際会議録

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