NON-STOICHIOMETRY AND ELECTRONIC STRUCTURE OF AMORPHOUS SILICON NITRIDE

NON-STOICHIOMETRY AND ELECTRONIC STRUCTURE OF AMORPHOUS SILICON NITRIDE

著者名:

掲載資料名:

Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

38

発行年:

1985

開始ページ:

309

終了ページ:

314

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837036 [0931837030]

言語:

英語

請求記号:

M23500/38

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015524
シリーズID:	PA00000011
会議名:	Symposium on plasma synthesis and etching of electronic materials
回次:	1984
会議開催地:	Boston, MA, USA
会議開催年:	1984.11.26-1984.11.30

類似資料:

1 国際会議録 ATOMIC AND ELECTRONIC STRUCTURE OF AMORPHOUS ALLOYS* Johnson, W. L. North-Holland	7 国際会議録 Electronic Structure of Amorphous Silicon Allan, G., Delerue, C., Lannoo, M. MRS - Materials Research Society
2 国際会議録 *ELECTRONIC STRUCTURE OF DEFECTS IN AMORPHOUS SILICON NITRIDE Robertson, John Materials Research Society	8 国際会議録 Electronic Raman Studies of Shallow Donors in Silicon Carbide Pusche, R., Hundhausen, M., Ley, L., Semmelroth, K., Pensl, G., Desperrier, P., Wellmann, P.J., Haller, E.E., Ager, … Trans Tech Publications
3 国際会議録 *AMORPHOUS SUPERLATTICES Ley, L. Materials Research Society	9 国際会議録 THE DENSITY OF STATES IN UNDOPED AND DOPED AMORPHOUS SILICON-GERMANIUM ALLOYS DETERMINED THROUGH PHOTOYIELD SPECTROSCOPY Aljishi, S., Shu, J., Ley, L. Materials Research Society
4 国際会議録 Electronically Induced Stoichiometry Violation in the Hexagonal Tantalum Nitride Arkipov, R. G. North-Holland	10 国際会議録 STUDY OF TEMPERATURE AND LIGHT BIAS EFFECTS ON THE OCCUPIED NEAR SURFACE DEFECT DENSITY IN HYDROGENATED AMORPHOUS SILICON Aljishi, S., Cohen, J. D., Ley, L. Materials Research Society
5 国際会議録 DEPOSITION CHEMISTRY AND STRUCTURE OF AMORPHOUS FLUORINATED SILICON NITRIDE Petrich, M.A., Livengood, R.E., Hess, D.W., Reimer, J.A. Materials Research Society	11 国際会議録 Hydrogenated Amorphous Silicon Nitride: Structural and Electronic Properties Justo, J. F., Mota, F. de Brito, Fazzio, A. MRS - Materials Research Society
6 国際会議録 ELECTRONIC STRUCTURE OF COMPENSATED DOPANTS IN HYDROGENATED AMORPHOUS SILICON Yang, L. H., Fong, C. Y. Materials Research Society	12 国際会議録 THE ELECTRONIC STRUCTURE OF CARBON NITRIDE Valladares, Ariel A., Sansores, L. Enrique MRS - Materials Research Society

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