CHARACTERIZATION, CONTROL, AND REDUCTION OF SUBBOUNDARIES IN SILICON ON INSULATORS

CHARACTERIZATION, CONTROL, AND REDUCTION OF SUBBOUNDARIES IN SILICON ON INSULATORS

著者名:

掲載資料名:

Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

35

発行年:

1985

開始ページ:

575

終了ページ:

582

総ページ数:

8

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837005 [0931837006]

言語:

英語

請求記号:

M23500/35

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015521
シリーズID:	PA00000011
会議名:	Symposium on energy beam-solid interactions and transient thermal processing
回次:	1984
会議開催地:	Boston, MA, USA
会議開催年:	1984.11.26-1984.11.30

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