EFFECTS OF IMPURITIES ON THE COMPETITION BETWEEN SOLID PHASE EPITAXY AND RANDOM CRYSTALLIZATION IN ION-IMPLANTED SILICON

EFFECTS OF IMPURITIES ON THE COMPETITION BETWEEN SOLID PHASE EPITAXY AND RANDOM CRYSTALLIZATION IN ION-IMPLANTED SILICON

著者名:

掲載資料名:

Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

35

発行年:

1985

開始ページ:

211

終了ページ:

218

総ページ数:

8

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837005 [0931837006]

言語:

英語

請求記号:

M23500/35

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015521
シリーズID:	PA00000011
会議名:	Symposium on energy beam-solid interactions and transient thermal processing
回次:	1984
会議開催地:	Boston, MA, USA
会議開催年:	1984.11.26-1984.11.30

類似資料:

1 国際会議録 KINETIC COMPETITION DURING SOLID PHASE CRYSTALLIZATION IN ION-IMPLANTED SILICON Olson, G. L., Roth, J. A., Hess, L. D., Narayan, J. North-Holland	7 国際会議録 EFFECTS OF IMPURITIES ON THE KINETICS OF NUCLEATION AND GROWTH IN AMORPHOUS SILICON Roth, J.A., Olson, G.L. Materials Research Society
2 国際会議録 Competition between solid phase epitaxy and random crystallization during cw laser annealing of amorphous Si films Roth, J.A., Kokorowski, S.A., Olson, G.L., Hess, L.D. North Holland	8 国際会議録 Laser-induced solid phase epitaxy of silicon deposited films Roth, J.A., Olson, G.L., Kokorowski, S.A., Hess, L.D. North Holland
3 国際会議録 Solute segregation and dynamics of solid-phase crystallization in In and Sb-implanted silicon Narayan, J., Olson, G.L., Holland, O.W. North Holland	9 国際会議録 THE EFFECT OF HYDROGEN ON THE KINETICS OF SOLID PHASE EPITAXY IN AMORPHOUS SILICON Roth, J.A., Olson, G.L., Jacobson, D.C., Poate, J.M., Kirschbaum, C. Materials Research Society
4 国際会議録 SOLID-PHASE-EPITAXIAL GROWTH OF ION IMPLANTED SILICON USING CW LASER AND ELECTRON BEAM ANNEALING Narayan, J., Holland, O. W., Olson, g. L. North-Holland	10 国際会議録 KINETICS AND MECHANISMS OF SOLID PHASE EPITAXY AND COMPETITIVE PROCESSES IN SILICON Olson, G. L. Materials Research Society
5 国際会議録 *LATERAL SOLID PHASE EPITAXY OF SILICON OVER OXIDE Roth, J. A., Olson, G. L., Hess, L. D. North-Holland	11 国際会議録 EXPLOSIVE CRYSTALLIZATION OF ION IMPLANTATION AMORPHOUS SILICON LAYERS Narayan, J., Rozgonyi, G. R., Bensahel, D., Auvert, G., Nguyan, V. T., Rai, A. K. North-Holland
6 国際会議録 *LASER-INDUCED SOLID PHASE CRYSTALLIZATION IN AMORPHOUS SILICON FILMS Olson, G. L., Kokorowski, S. A., Roth, J. A., Hess, L. D. North-Holland	12 国際会議録 CRYSTALLIZATION AND MELTING OF AMORPHOUS SILICON ON A MICROSECOND TIME SCALE Olson, G.L., Roth, J.A., Nygren, E., Pogany, A.P., Williams, J.S. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12