LASER-EXCITED FLOURESCENCE DETECTION OF Si2 DURING SILANE CVD
- 著者名:
- 掲載資料名:
- Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 29
- 発行年:
- 1984
- 開始ページ:
- 225
- 終了ページ:
- 230
- 総ページ数:
- 6
- 出版情報:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444008947 [0444008942]
- 言語:
- 英語
- 請求記号:
- M23500/29
- 資料種別:
- 国際会議録
類似資料:
American Institute of Chemical Engineers |
Society of Photo-optical Instrumentation Engineers |
Electrochemical Society | |
MRS - Materials Research Society |
MRS - Materials Research Society |
American Institute of Chemical Engineers |
MRS - Materials Research Society |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
Materials Research Society |