CHARACTERIZATION OF N-TYPE LAYERS FORMED IN Si BY ION IMPLANTATION OF HYDROGEN
- 著者名:
Wilson, S. R. Paulson, W. M. Krolikowski, W. F. Fathy, D. Gressett, J. D. Hamdi, A. H. McDaniel, F. D. - 掲載資料名:
- Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 27
- 発行年:
- 1984
- 開始ページ:
- 287
- 終了ページ:
- 292
- 総ページ数:
- 6
- 出版情報:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444008695 [0444008691]
- 言語:
- 英語
- 請求記号:
- M23500/27
- 資料種別:
- 国際会議録
類似資料:
North-Holland |
MRS - Materials Research Society |
North-Holland |
Electrochemical Society |
North Holland | |
Materials Research Society |
Materials Research Society |
Materials Research Society |
11
国際会議録
GRAIN GROWTH PROCESSES DURING TRANSIENT ANNEALING OF As-IMPLANTED, POLYCRYSTALLINE-SILICON FILMS
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |