*LATERAL SOLID PHASE EPITAXY OF SILICON OVER OXIDE

*LATERAL SOLID PHASE EPITAXY OF SILICON OVER OXIDE

著者名:

掲載資料名:

Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

23

発行年:

1984

開始ページ:

431

終了ページ:

442

総ページ数:

12

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444009036 [0444009035]

言語:

英語

請求記号:

M23500/23

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015507
シリーズID:	PA00000011
会議名:	Symposium on energy beam-solid interactions and transient thermal processing
回次:	1983
会議開催地:	Boston, MA, USA
会議開催年:	1983.11.14-1983.11.17

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2 国際会議録 KINETIC COMPETITION DURING SOLID PHASE CRYSTALLIZATION IN ION-IMPLANTED SILICON Olson, G. L., Roth, J. A., Hess, L. D., Narayan, J. North-Holland	8 国際会議録 Evidence against a reduced melting temperature in amorphous silicon Kokorowski, S.A., Olson, G.L., Roth, J.A., Hess, L.D. North Holland
3 国際会議録 *LASER-INDUCED SOLID PHASE CRYSTALLIZATION IN AMORPHOUS SILICON FILMS Olson, G. L., Kokorowski, S. A., Roth, J. A., Hess, L. D. North-Holland	9 国際会議録 Thin Single Crystal Silicon On Oxide By Lateral Solid Phase Epitaxy Of Amorphous Silicon And Silicon Germanium Gibbons, J. F., Greene, B. J., Hoyt, J. L., Valentino, J. Materials Research Society
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