Formation and crystallizationof amorphous silicides at the interface between thin metal and amorphous silicon films

Formation and crystallizationof amorphous silicides at the interface between thin metal and amorphous silicon films

著者名:

掲載資料名:

Interfaces and contacts : symposium held November 1982 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

18

発行年:

1983

開始ページ:

197

終了ページ:

206

総ページ数:

10

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444008206 [0444008209]

言語:

英語

請求記号:

M23500/18

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015501
シリーズID:	PA00000011
会議名:	Symposium on interfaces and contacts
回次:	1982
会議開催地:	Boston, MA, USA
会議開催年:	1982.11.01-1982.11.04

類似資料:

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2 国際会議録 METAL RICH SILICIDE FORMATION BETWEEN THIN FILMS OF VANADIUM AND AMORPHOUS SILICON Psaras, P. A., Eizenberg, M., Tu, K. N. Materials Research Society	8 国際会議録 Shallow contact formation of gadolinium silicide Cheng, I. C., Lau, S. S., Thompson, R. D., Tu, K. N. North-Holland
3 国際会議録 KINETICS AND THERMODYNAMICS OF AMORPHOUS SILICIDE FORMATION IN NICKEL/AMORPHOUS-SILICON MULTILAYER THIN FILMS Clevenger, L. A, Thompson, C. V., de Avillez, R. R., Tu, K. N Materials Research Society	9 国際会議録 Lattice Imaging of Silicide-Silicon Interfaces Chen, L. J., Mayer, J. W., Tu, K. N., Sheng, T. T. North-Holland
4 国際会議録 CROSS-SECTIONAL TEM STUDY OF RHODIUM ON SINGLE CRYSTAL AND AMORPHOUS SILICON Herd, S. R., Psaras, P. A., Fisher, I. J., Tu, K. N. Materials Research Society	10 国際会議録 Ni Silicide Mediated Crystallization of Amorphous Silicon Thin Film on Glass at 360℃ Park, S.I., Kim, K.H., Sohn, W. ., Chot, J.H., Jang, J. Electrochemical Society
5 国際会議録 THIN Ni SILICIDE FORMATION BY LOW TEMPERATURE-INDUCED METAL ATOM REACTION WITH ION IMPLANTED AMORPHOUS SILICON Erokhin, Yu.N., Patnaik, B.K., Pramanick, S., Hong, F., White, C.W., Rozgonyi, G.A. Materials Research Society	11 国際会議録 Ultra-Thin TaN Films as Diffusion Barriers for Cu Metallization Huang, Sharon S., Tu, K. N., Sun, Bingxi MRS - Materials Research Society
6 国際会議録 *KINETICS AND THERMODYNAMICS OF AMORPHOUS SILICIDE FORMATION IN METAL/AMORPHOUS-SILICON MULTILAYER THIN FILMS Thompson, C. V., Clevenger, L. A., DeAvillez, R., Ma, E., Miura, H. Materials Research Society	12 国際会議録 THE EFFECT OF HYDROGENATED AMORPHOUS SILICON ON THE FORMATION RATE KINETICS AND CRYSTALLOGRAPHY OF PALLADIUM SILICIDE FILMS Manning, N. R., Chen, hayden, Abelson, J. R., Allen, L. H. Materials Research Society

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