A COMPARISON OF ELLIPSOMETER AND RBS ANALYSIS OF IMPLANT DAMAGE IN SILICON

A COMPARISON OF ELLIPSOMETER AND RBS ANALYSIS OF IMPLANT DAMAGE IN SILICON

著者名:

Paulson, W. M.
Wilson, S. R. ( Semiconductor Research and Development Labs., Motorola, Inc., Phoenix, AZ; )
White, C. W.
Appleton, B. R. ( Oak Ridge Nationa Laboratory, Oak Ridge, TN )

掲載資料名:

Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

14

発行年:

1983

開始ページ:

523

終了ページ:

528

総ページ数:

6

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444008121 [0444008128]

言語:

英語

請求記号:

M23500/14

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015498
シリーズID:	PA00000011
会議名:	Symposium on defects in semiconductors
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1982.11.00

類似資料:

1 国際会議録 Thermal stability of ion implanted, laser annealed films Wilson, S.R., Paulson, W.M., Tam, G., Gregory, R.B., White, C.W., Appleton, B.R. North Holland	7 国際会議録 Structure Property Relationships in Ion Implanted Ceramics McHargue J. C., Appleton R. B., White W. C. Martinus Nijhoff Publishers
2 国際会議録 SUPERCONDUCTING CRITICAL TEMPERATURES OF C-IMPLANTED A15 STRUCTURE V-Si Gavaler, J. R., Braginski, A. I., Manocha, A. S., Appleton, B. R., White, C. W., Williams, J. M. North-Holland	8 国際会議録 Kinetic effects and mechanisms limiting substitutional solubility in the formation of supersaturated alloys by pulsed laser annealing White, C.W., Appleton, B.R., Stritzker, B., Zehner, D.M., Wilson, S.R. North Holland
3 国際会議録 GRAIN GROWTH PROCESSES DURING TRANSIENT ANNEALING OF As-IMPLANTED, POLYCRYSTALLINE-SILICON FILMS Krause, S. J., Wilson, S. R., Paulson, W. M., Gregory, R. B. Materials Research Society	9 国際会議録 THE USE OF ION CHANNELING AXIAL SCANS IN THE STUDY OF ION-IMPLANTED A12O3 Farlow, G. C., White, C. W., Appleton, B. R., Skland, P. S., McHargue, C. J. Materials Research Society
4 国際会議録 ISOTHERMAL ANNEALING OF ION IMPLANTED SILICON WITH A GRAPHITE RADIATION SOUCE Wilson, S. R., Gregory, R. B., Paulson, W. M., Handi, A. H., McDaniel, F. D. North-Holland	10 国際会議録 Zone refining of nonsubstitutional impurities during pulsed laser annealing White, C.W., Naramoto, H., Williams, J.M., Narayan, J., Appleton, B.R., Wilson, S.R. North Holland
5 国際会議録 *DOPANT INCORPORATION DURING RAPID SOLIDIFICATION White, C. W., Zehner, D. M., Narayan, J., Holland,. O, W.,, Appleton, B. R., Wilson, S. R. North-Holland	11 国際会議録 STRUCTURE AND PROPERTIES OF SINGLE CRYSTAL Al203 IMPLANTED WITH CHROMIUM AND ZIRCONIUM McHargue, C. J., Naramoto, H., Appleton, B. R., White, C. W., Williams, J. M. North-Holland
6 国際会議録 PULSED LASER ANNEALING OF ION IMPLANTED Ge Holland,. O, W.,, Narayan, J., White, C. W., Appleton, B. R. North-Holland	12 国際会議録 TRANSIENT ANNEALING OF BORON IMPLANTED DEVICES Wilson, S. R., Paulson, W. M., Varker, C. J., Lowe, A., Gregory, R. B., Reuss, R. H., Wu, S. Y., Whitfield, J. D. North-Holland

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