OXYGEN AND NITROGEN INCORPORATION DURING CW LASER RECRYSTALLIZATION OF POLYSILICON

OXYGEN AND NITROGEN INCORPORATION DURING CW LASER RECRYSTALLIZATION OF POLYSILICON

著者名:

掲載資料名:

Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

13

発行年:

1983

開始ページ:

511

終了ページ:

516

総ページ数:

6

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444007889 [0444007881]

言語:

英語

請求記号:

M23500/13

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015497
シリーズID:	PA00000011
会議名:	Symposium on laser-solid interactions and transient thermal processing of materials
回次:	1982
会議開催地:	Boston, MA, USA
会議開催年:	1982.11.01-1982.11.04

類似資料:

1 国際会議録 BEAM SHAPING FOR CW LASER RECRYSTALLIZATION OF POLYSILICON FILMS Zorabedia, P., Drowley, C. I., Kamins, T. I., Cass, T. R. North-Holland	7 国際会議録 Surface morphology and recrystallization behavior of amorphous Si after ArF laser-irradiation Chen, T.T., Chang, C.Y., Chao, C.L., Ma, K.J., Liu, Y.M., Chen, Y.T., Lin, C.W. SPIE - The International Society of Optical Engineering
2 国際会議録 OFFSET-GATE STRUCTURES FOR INCREASED BREAKDOWN VOLTAGES IN SILICON-ON-INSULATOR TRANSISTORS Drowley, C. I., Kamins, T. I. North Holland	8 国際会議録 LATERAL SEEDING OF SILICON-ON-INSULATOR USING AN ELLIPTICAL LASER BEAM: A COMPARISON OF SCANNING METHODS Zorabedian, P., Kamins, T. I. North Holland
3 国際会議録 LASER-RECRYSTALLIZED SOI DEVICES: PROMISES AND PITFALLS Kamins, T. I. North Holland	9 国際会議録 Nonequilibrium crystal growth during pulsed laser annealing White, C.W. North Holland
4 国際会議録 GRAIN BOUNDARY CONFINEMENT IN SOl FILMS USING PATTERNED AR COATINGS AND SEEDED OSCILLATORY GROWTH Drowley, C. I., Zorabedian, P., Kamins, T. I. North-Holland	10 国際会議録 Structural and electrical characterization of shaped beam laser recrystallized polysilicon on amorphous substrates Stultz, T.J., Gibbons, J.F. North Holland
5 国際会議録 *DEPOSITION AND CHARACTERISTICS OF POLYSILICON FILMS FOR INTEGRATED-CIRCUIT APPLICATIONS Kamins, T. Materials Research Society	11 国際会議録 20-Kw nitrogen diluent chemical oxygen-iodine laser Yang, T.T., Bhowmik, A., Burde, D., Clark, R., Carroll, S., Dickerson, R.A., Eblen, J., Gylys, V.T., Hsia, Y.C., … SPIE-The International Society for Optical Engineering
6 国際会議録 A COMPARISON OF CW LASER AND ELECTRON-BEAM Drowley, C. I., Hu, C. North-Holland	12 国際会議録 Schottky-diodes in laser recrystallized polysilicon Schaber, H., Schelpmeier, H., Werner, W.M., Cutter, D. North Holland

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