*APPLICATIONS OF LASER ANNEALING IN IC FABRICATION | 東京工業大学附属図書館文献データベース

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*APPLICATIONS OF LASER ANNEALING IN IC FABRICATION

著者名:

Kokorowski, S. A.

さらに 5 件

掲載資料名:

Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

13

発行年:

1983

開始ページ:

337

終了ページ:

348

総ページ数:

12

出版情報:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444007889 [0444007881]

言語:

英語

請求記号:

M23500/13

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015497
シリーズID:	PA00000011
会議名:	Symposium on laser-solid interactions and transient thermal processing of materials
回次:	1982
会議開催地:	Boston, MA, USA
会議開催年:	1982.11.01-1982.11.04

類似資料:

1 国際会議録 Laser-assisted MOS/SOS transistor fabrication Hess, L.D., Kokorowski, S.A., Olson, G.L., Chi, Y.M., Gupta, A., Valdez, J.B. North Holland	7 国際会議録 Laser processing of silicon for advanced microelectronic devices and circuits Hess, L.D., Kokorowski, S.A., Olson, G.L., Yaron, G. North Holland
2 国際会議録 *LASER-INDUCED SOLID PHASE CRYSTALLIZATION IN AMORPHOUS SILICON FILMS Olson, G. L., Kokorowski, S. A., Roth, J. A., Hess, L. D. North-Holland	8 国際会議録 Evidence against a reduced melting temperature in amorphous silicon Kokorowski, S.A., Olson, G.L., Roth, J.A., Hess, L.D. North Holland
3 国際会議録 Competition between solid phase epitaxy and random crystallization during cw laser annealing of amorphous Si films Roth, J.A., Kokorowski, S.A., Olson, G.L., Hess, L.D. North Holland	9 国際会議録 Fabrication of ZnO/GaN Hybrid Light-Emitting Diodes S. Y. Han, H. S. Yang, Y. W. Heo, K. H. Baik, D. P. Norton, S. J. Pearton, F. Ren, A. Osinsky, J. W. Dong, B. Hertog, A. … Electrochemical Society
4 国際会議録 Thermal analysis of CW laser annealing beyond the melt temperature Kokorowski, S.A., Olson, G.L., Hess, L.D. North Holland	10 国際会議録 PULSED EXCIMER LASER (308 nm) ANNEALING OF ION IMPLANTED SILICON AND SOLAR CELL FABRICATION Lowndes, D. H., Cleland, J., W., Christie, W. H., Eby, R. E., Jellison Jr., G. E, Narayan, J., Westbrook, R. D., Wood, … North-Holland
5 国際会議録 Laser-induced solid phase epitaxy of silicon deposited films Roth, J.A., Olson, G.L., Kokorowski, S.A., Hess, L.D. North Holland	11 国際会議録 Optimization Of Thermal Processing And Chemistry In The Fabrication Of A PZT Based MEMS Power Generator Olson, B.W., Skinner, J.L., Richards, C.D., Richards, R.F., Bahr, D.F. Materials Research Society
6 国際会議録 Direct Measurement of CW laser-induced crystal growth dynamics by time-resolved optical reflectivity Olson, G.L., Kokorowski, S.A., Roth, J.A., Hess, L.D. North Holland	12 国際会議録 RAPID THERMAL ANNEALING OF GaAs/A1GaAs COUPLED DOUBLE QUANTUM WELLS Koteles, Emil S., Elman, B., Armiento, C. A., Melman, P., Chi, J. Y., Holmstrom,. R. J., Powers, J., Owens, D., … Materials Research Society

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