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Preparation and Characterization of Silicon Nanostructures Obtained by Ion Implantation

著者名:
Mestanza, S. N. M.
Dias, G. O.
Queiroz, J. E. C.
Doi, I.
Swart, J. W.
Rodriguez, E.
Neves, A. A. R.
Martinho, H.
さらに 3 件
掲載資料名:
Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-03
発行年:
2004
開始ページ:
169
終了ページ:
176
総ページ数:
8
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774161 [1566774160]
言語:
英語
請求記号:
E23400/200403
資料種別:
国際会議録

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