Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane
- 著者名:
Kovalgin, A. Y. Holleman, J. lordache, G. Jenneboer, T. Falke, F. Zieren, V. Goossens, M. - 掲載資料名:
- Microfabricated systems and MEMS VII : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2004-09
- 発行年:
- 2004
- 開始ページ:
- 173
- 終了ページ:
- 183
- 総ページ数:
- 11
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774222 [1566774225]
- 言語:
- 英語
- 請求記号:
- E23400/200409
- 資料種別:
- 国際会議録
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