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Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane

著者名:
Kovalgin, A. Y.
Holleman, J.
lordache, G.
Jenneboer, T.
Falke, F.
Zieren, V.
Goossens, M.
さらに 2 件
掲載資料名:
Microfabricated systems and MEMS VII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-09
発行年:
2004
開始ページ:
173
終了ページ:
183
総ページ数:
11
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774222 [1566774225]
言語:
英語
請求記号:
E23400/200409
資料種別:
国際会議録

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