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High performance SOI technology for sub-45nm gate length CMOS manufacturing Invited

著者名:
Horstmann, M.
Greenlaw, D.
Huebler, P.
Stephan, R.
Feudel, Th.
Wei, A.
Frohberg, K.
Hoentschel, J.
Javorka, P.
Burbach, G.
Schwan, C.
Peters, C.
Lenski, M
Press, P.
Kammler, Th.
Bierstedt, H.
Otterbach, R.
Neu, A.
Wieczorek, K.
Schaller, M.
Salz, H.
Hohage, J.
Ruelke, H.
Klais, J.
Grasshoff, G.
Ehrichs, E.
Goad, S.
Raab, M.
Kepler, N.
さらに 24 件
掲載資料名:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-03
発行年:
2005
開始ページ:
57
終了ページ:
68
総ページ数:
12
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774611 [1566774616]
言語:
英語
請求記号:
E23400/200503
資料種別:
国際会議録

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