MEMS Fabrication for Wireless Communications Using Copper Interconnect Technology | 東京工業大学附属図書館文献データベース

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MEMS Fabrication for Wireless Communications Using Copper Interconnect Technology

著者名:

Magerlein, J.H.

さらに 4 件

掲載資料名:

Electrochemical processes in ULSI and MEMS : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2004-17

発行年:

2005

開始ページ:

341

終了ページ:

352

総ページ数:

12

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774727 [1566774721]

言語:

英語

請求記号:

E23400/200417

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015410
シリーズID:	PA00000028
会議名:	Symposium on Electrochemical Processes in ULSI and MEMS ; Spring Meeting of the Electrochemical Society
回次:	2004 ; 205th
会議開催地:	San Antonio, TX, USA
会議開催年:	2004.00.00

類似資料:

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2 国際会議録 Spiral Inductors on Silicon for Wireless Communications Trabulo, P.M., Duraes, D.A., Mendes, P.M., Garrido, P.J., Correia, J.H. Trans Tech Publications	8 国際会議録 High-Performance SiGe MODFET Technology Koester, S.J., Chu, J.O., Saenger, K.L., Ouyang, Q.C., Ott, J.A., Canaperi, D.F., Tornello, J.A., Jahnes, C.V., Steen, … Materials Research Society
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6 国際会議録 Prospective applications of MEMS in wireless communications Santos,H.J.De Los SPIE-The International Society for Optical Engineering	12 テクニカルペーパー QPPM Receiver for Free-Space Laser Communications Budinger, J.M., Mohamed, J.H., Nagy, L.A., Lizanich, P.J., Mortensen, D.J. National Aeronautics and Space Adminstration

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