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Low-Temperature Deposition of Poly-Si and SiGe Thin Films at 450oC and Fabrication of High Mobility TFTs Over 50 CM2/VS Invited Paper

著者名:
掲載資料名:
Thin Film Transistor Technologies (TFTT VII) : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-15
発行年:
2005
開始ページ:
308
終了ページ:
318
総ページ数:
11
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774581 [1566774586]
言語:
英語
請求記号:
E23400/200415
資料種別:
国際会議録

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