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(10.4) 2:35 -2:55 PM - SiGe-based Combined MBE and CVD Processing for Vertical "Silicon-on-Nothing" (SON) Device Technology

著者名:
Schulze, J.
Eisele, I.
Thompson, P.E.
Jernigan, G.
Bassim, N.
Suligoj, T. (University of the German Federal Armed Forces Munich, US Naval Research Laboratory, University of Zagreb)
さらに 1 件
掲載資料名:
SiGe: materials, processing, and devices : proceedings of the First international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-07
発行年:
2004
開始ページ:
719
終了ページ:
730
総ページ数:
12
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774208 [1566774209]
言語:
英語
請求記号:
E23400/200407
資料種別:
国際会議録

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