(6.1) 10:35 - 11:05 AM - SiGe MODFETs: Overview and Issues for Sub-100 nm Gate-Length Scaling (Invited)
- 著者名:
Koester, S. J. Chu, J. O. Saenger, K. L. Ouyang, Q. C. Ott, J. A. Canaperi, D. F. Tornello, J. A. Jahnes, C. V. (IBM) - 掲載資料名:
- SiGe: materials, processing, and devices : proceedings of the First international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2004-07
- 発行年:
- 2004
- 開始ページ:
- 449
- 終了ページ:
- 458
- 総ページ数:
- 10
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774208 [1566774209]
- 言語:
- 英語
- 請求記号:
- E23400/200407
- 資料種別:
- 国際会議録
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