(4.18) 8:16 - 8:19 PM - Enhancement of SiGe Relaxation for Fabrication of SGOI Substrates Using Condensation
- 著者名:
Sadaka, M. Thean, A. Barr, A. White, T. Vartanian, V. Zavala, M. Nguyen, B-Y. Xie, Q. Liu, R. Wang, X-D. Kottke, M. Zollner, S. (Freescale) - 掲載資料名:
- SiGe: materials, processing, and devices : proceedings of the First international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2004-07
- 発行年:
- 2004
- 開始ページ:
- 281
- 終了ページ:
- 288
- 総ページ数:
- 8
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774208 [1566774209]
- 言語:
- 英語
- 請求記号:
- E23400/200407
- 資料種別:
- 国際会議録
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