(3.1) 3:20 - 3:50 PM - Strained-Si/SiGe-on-Insulator CMOS Technology as a Platform of Device Performance Boosters (Invited)
- 著者名:
Takagi, S. Mizuno, T. Tezuka, T Sugiyama, N. Numata, T. Usuda, K. Moriyama, Y. Nakaharai, S. Koga, J. Tanabe, A. Hirashita, N. Irisawa, T. Maeda, T.(MIRAI-AIST) - 掲載資料名:
- SiGe: materials, processing, and devices : proceedings of the First international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2004-07
- 発行年:
- 2004
- 開始ページ:
- 61
- 終了ページ:
- 76
- 総ページ数:
- 16
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774208 [1566774209]
- 言語:
- 英語
- 請求記号:
- E23400/200407
- 資料種別:
- 国際会議録
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