Sensors Based on SiC-AIN MEMS

Sensors Based on SiC-AIN MEMS

著者名:

Doppalapudi, D.

掲載資料名:

State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2004-06

発行年:

2004

開始ページ:

287

終了ページ:

299

総ページ数:

13

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774192 [1566774195]

言語:

英語

請求記号:

E23400/200406

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015396
シリーズID:	PA00000028
会議名:	Symposium on Nitride and Wide Bandgap Semiconductors for Sensors, Photonics and Electronics ; State-of-the-Art Program on Compound Semiconductors ; Meeting of the Electrochemical Society
回次:	5th ; 41st ; 206th
会議開催地:	Honolulu, Hawaii, USA
会議開催年:	2004.10.03-2004.10.08

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1 国際会議録 MBE Grown AlN Films on SiC for Piezoelectric MEMS Sensors Doppalapudi, Dharanipal, Mlcak, Richard, Chan, Jeffrey, Tuller, Harry, Bhattacharya, Anirban, Moustakas, Theodore Materials Research Society	7 国際会議録 Threading defect reduction in laterally overgrown GaN films by Hydride Vapor Phase Epitaxy Doppalapudi, D., Nam, K.J., Sampath, A., Singh, Raj, Ng. H.M., Basu, S.N., Moustakas, T.D. Electrochemical Society
2 国際会議録 Single Crystal SiC Microhotplate Conduetometrie Chemical Sensor Arrays Mlcak, R., Doppalapudi, D., Whitfield, G., H. Tuller (Boston MicroSystems, Inc.) Electrochemical Society	8 国際会議録 Performance of a biaxial MEMS-based scanner for microdisplay applications Wine,D.W., Helsel,M.P., Jenkins,L., Urey,H., Osborn,T.D. SPIE-The International Society for Optical Engineering
3 国際会議録 Distributed Bragg reflectors based on AlN/GaN multilayers Ng. H.M., Doppalapudi, D., Iliopoulos, E., Moustakas, T.D. Electrochemical Society	9 国際会議録 MBE Growth and Optical Characterization of InGaN/AlGaN Multiquantum Wells Singh, R., Herzog, W. D., Doppalapudi, D., Unlu, M. S., Goldberg, B. B., Moustakas, T. D. MRS - Materials Research Society
4 国際会議録 MEMS Microresonators for High Temperature Sensor Applications Dharanipal Doppalapudi, Richard Mlcak, Jeremie LeClair, Patrick Gwynne, Jeffrey Bridgham, Scott Purchase, Martin … Materials Research Society	10 国際会議録 Phase Separation and Atomic Ordering in AlGalnN Alloys Moustakas, T. D., Singh, R., Korakakis, D., Doppalapudi, D., Ng, H. M., Sampath, A., Iliopoulos, E., Misra, M. MRS - Materials Research Society
5 国際会議録 Electron Mobility of n-Type GaN Films Ng, H. M., Doppalapudi, D., Singh, R., Moustakas, T. D. MRS - Materials Research Society	11 国際会議録 Near Bandgap Photoluminescence Broadening in n-GaN Films Iliopoulos, E., Doppalapudi, D., Ng, H. M., Moustakas, T. D. MRS - Materials Research Society
6 国際会議録 Electrochemically Micromachined Cantilever Beams Tailored for Enhanced Sensor Performance Mlcak, Richard, Tuller, Harry L. Electrochemical Society	12 国際会議録 MEMS sensors and wireless telemetry for distributed systems Britton,C.L.,Jr., Warmack,R.J., Smith,S.F., Oden,P.I., Brown,G.M., Bryan,W.L., Clonts,L.G., Duncan,M.G., Emery,M.S., … SPIE-The International Society for Optical Engineering

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