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Fabrication of Group III-Nitride Waveguides by Inductively Coupled Plasma Etching

著者名:
Li, N.
Waki, I.
Kumtornkittikul, C.
Liang, J.-H.
Sugiyama, M.
Shimogaki, Y.
Nakano, Y.
さらに 2 件
掲載資料名:
State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-06
発行年:
2004
開始ページ:
270
終了ページ:
275
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774192 [1566774195]
言語:
英語
請求記号:
E23400/200406
資料種別:
国際会議録

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