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He-induced Nanocavities for the Gettering of Metallic Impurities in Silicon

著者名:
Ntsoenzok, E.
Delamare, R.
Alquier, D.
Liu, C.L.
Ashok, S.
Ruault, M.O.
さらに 1 件
掲載資料名:
High purity silicon VIII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-05
発行年:
2004
開始ページ:
202
終了ページ:
207
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774185 [1566774187]
言語:
英語
請求記号:
E23400/200405
資料種別:
国際会議録

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