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Characteristics of Self-Assembled Ultra-Low-k Porous Silica Films

著者名:
Oku, Y.
Fujii, N.
Kohmura, K.
Yamada, K.
Hata, N.
Seine, Y.
Ichikawa, R.
Nishiyama, N.
Tanaka, S.
Miyoshi, H.
Oike, S.
Tanaka, H.
Takada, S.
Negoro, C.
Nakano, A.
Rang, H. -K.
Suh, K. -P.
さらに 12 件
掲載資料名:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-04
発行年:
2004
開始ページ:
331
終了ページ:
345
総ページ数:
15
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774178 [1566774179]
言語:
英語
請求記号:
E23400/200404
資料種別:
国際会議録

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