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Hydrogen-plasma-enhanced thermal donor formation in n-type high-resistivity MCZ silicon

著者名:
Simoen, E.
Huang, Y. L.
Claeys, C.
Raft, J. M.
Job, R.
Fahrner, W. R.
Versluys, J.
Clauws, P.
さらに 3 件
掲載資料名:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-10
発行年:
2005
開始ページ:
165
終了ページ:
175
総ページ数:
11
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774284 [1566774284]
言語:
英語
請求記号:
E23400/200510
資料種別:
国際会議録

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