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Wafer scale characterization of interface state densities without test structures by photocurrent analysis

著者名:
掲載資料名:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-10
発行年:
2005
開始ページ:
113
終了ページ:
122
総ページ数:
10
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774284 [1566774284]
言語:
英語
請求記号:
E23400/200510
資料種別:
国際会議録

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