High-k hafnium silicate films on silicon and germanium wafers by MOCVD using single-source precursor
- 著者名:
Lemberger, M. Schon, F. Dirnecker, T. Jank, M. P. M. Pakaleva, A. Bauer, A. J. Frey, L. Ryssel, H. - 掲載資料名:
- EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2005-09
- 発行年:
- 2005
- 開始ページ:
- 873
- 終了ページ:
- 880
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774277 [1566774276]
- 言語:
- 英語
- 請求記号:
- E23400/200509
- 資料種別:
- 国際会議録
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