Planar Bonded Double Gate MOS Transistors Down to LG = 10 nm (Invited paper)
- 著者名:
Vinet, M. Widiez, J. Lolivier, J. Poiroux, T. Biasse, B. Previtali, B. Dechamp, J. Deleonibus, S. - 掲載資料名:
- ULSI Process Integration : proceedings of the International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2005-06
- 発行年:
- 2005
- 開始ページ:
- 285
- 終了ページ:
- 295
- 総ページ数:
- 11
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774642 [1566774640]
- 言語:
- 英語
- 請求記号:
- E23400/200506
- 資料種別:
- 国際会議録
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