50 Characterization of the Effect of High-k Process Conditions on the Performance of Flash Memory by a DOE Method

50 Characterization of the Effect of High-k Process Conditions on the Performance of Flash Memory by a DOE Method

著者名:

Jean, J.

掲載資料名:

Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2005-05

発行年:

2005

開始ページ:

411

終了ページ:

417

総ページ数:

7

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774635 [1566774632]

言語:

英語

請求記号:

E23400/200505

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015388
シリーズID:	PA00000028
会議名:	International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS ; Meeting of the Electrochemical Society
回次:	2005 ; 207th
会議開催地:	Quebec City, QC, Canada
会議開催年:	2005.05.16-2005.05.18

類似資料:

1 国際会議録 Hf Cross-Contamination in RTCVD System and its Effect on Gate Oxide Lntegnty Jean, J., Vermeire, B., Parks, H., Raghavan, S., Ogle, B. Electrochemical Society	7 国際会議録 High concentoration (2500suns), high throughput, automated flash tester with calibrated color balance and intensity control M. Ludowise, S. Taylor, E. Lucow, H. Chan Society of Photo-optical Instrumentation Engineers
2 国際会議録 Positive and negative tone double patterning lithography for 50nm flash memory [6154-37] Lim, C. M., Kim, S. M., Hwang, Y. S., Choi, J. -S., Ban, K. -D., Cho, S. -Y., Jung, J. K., Knag, E. -K., Lim, H. -Y., … SPIE - The International Society of Optical Engineering	8 国際会議録 Computational methods for analyzing the intermolecular resonant vibrational interactions in liquids and the noncoincidence effect of vibrational spectra Torii, Hajime Kluwer Academic Publishers
3 国際会議録 Growth and Characterization of PbSe and Pb1-x Snx Se Layers on Si(100) Sachar, H. K., Chao, I., Fang, X. M., McCann, P. J. MRS - Materials Research Society	9 テクニカルペーパー Effect of Inner Core Rotation on Laminarizing Flows in Annular Tube Under Strong Heating Torii, S. American Institute of Aeronautics and Astronautics
4 国際会議録 Growth and Characterization of PbSe and Pb1-xSnxSe Layers on Si(100) Sachar, H. K., Chao, I., Fang, X. M., McCann, P. J. MRS - Materials Research Society	10 国際会議録 High-k Materials in Flash Memories M. Alessandri, R. Piagge, S. Alberici, E. Bellandi, M. Caniatti, G. Ghidini, A. Modelli, G. Pavia, E. Ravizza, A. … Electrochemical Society
5 テクニカルペーパー Relation Between Aluminum Die-Casting Conditions and Dimensional Stability. Ogasawara, A., Tanikawa, H., Kato, T., Torii, S., Ueno, M. Society of Automotive Engineers	11 国際会議録 Flow Visualization and Thermal-Fluid Flow Phenomenon in Single Plate Heat Exchanger with Various Plate Shapes Formed by Shock Processing Method S. Torii Trans Tech Publications
6 国際会議録 (38a) Soft Hydrogel Microparticles of Controlled Size and Stiffness with An Emulsion-Based Method Ka Man Carmen Chan, Randolph H. Li, Eric Trac, Steven M. Zeitels, Robert Langer American Institute of Chemical Engineers	12 国際会議録 The rapid introduction of immersion lithography for NAND flash: challenges and experience C.-T. Wu, H. M. Lin, W.-M. Wu, M.-H. Chan, B. S.-M. Lin Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12