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16 Properties of HfTaxOy High-K Layers Deposited by ALCVD

著者名:
Zhao, C.
Rittersma, Z. M.
Van Berkum, J. G. M.
Snijders, J. H. M.
Hendriks, A.
Breimer, P.
Groat, P.
Maes, J. W.
Wittesr, H.
Afanas'ev, V. V.
Tois, E.
Tuominen, M.
Caymax, M.
De Gendt, S.
Heyns, M.
さらに 10 件
掲載資料名:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-05
発行年:
2005
開始ページ:
133
終了ページ:
140
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774635 [1566774632]
言語:
英語
請求記号:
E23400/200505
資料種別:
国際会議録

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