Blank Cover Image

Physical Mechanisms of Ultra-Thin Silicon Dioxide Degradation and Breakdown

著者名:
Vogel, E.M.  
掲載資料名:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-01
発行年:
2005
開始ページ:
279
終了ページ:
292
総ページ数:
14
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774598 [1566774594]
言語:
英語
請求記号:
E23400/200501
資料種別:
国際会議録

類似資料:

Groeseneken, G., Degraeve, R., De Blauwe, J., Roussel, P., Depas, M., Maes, H.

Electrochemical Society

Yoneda, Kenji, Fukuzaki, Yoshiki, Satoh, Kazuo, Todokoro, Yoshihiro, Inoue, Morio

Materials Research Society

Chung, I.J., Oh, C.H., Kim, W.Y., Hwang, J.Y., Kim, Y.S., Park, J.S., Lee, S.K., Han, M.K.

Materials Research Society

Chan, Kevin K., Lee, Young H., Stanis, Carol L.

MRS - Materials Research Society

Chen, T.P., Tse, M.S.

Electrochemical Society

Shi, Y., Wang, X.W., Ma, T.P., Cui, G.J., Tamagawa, T., Halpern, B.L.

Electrochemical Society

Chaparala,P., Suehle,J.S.

SPIE-The International Society for Optical Engineering

ManjulaRani, K.N., Rao, V. Ramgopal, Vasi, J.

Materials Research Society

Rolo G. A., Gomes M. J. M., Belsley M., Ribeiro L. J.

Kluwer Academic Publishers

Rodriguez, R., Nafria, M., Miranda, E., Sune, J., Aymerich, X.

MRS-Materials Research Society

Uno, S., Ishida, A., Okada, K., Sakura, T., Deguchi, K., Kamakura, Y., Taniguchi, K.

MRS-Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12