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Kinetic Monte Carlo Simulation of the Growth of Polycrystalline Cu Films

著者名:
掲載資料名:
AIChE 2000 ANNUAL MEETING
シリーズ名:
AIChE meeting [papers]
シリーズ巻号:
2000
発行年:
2000
ペーパー番号:
215C
総ページ数:
13
出版情報:
New York: American Institute of Chemical Engineers
言語:
英語
請求記号:
A08000
資料種別:
国際会議録

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