Kinetic Monte Carlo Simulation of the Growth of Polycrystalline Cu Films
- 著者名:
- Wang, Liguo ( Cornell University, Ithaca, NY )
- Clancy, Paulette ( Cornell University, Ithaca, NY )
- 掲載資料名:
- AIChE 2000 ANNUAL MEETING
- シリーズ名:
- AIChE meeting [papers]
- シリーズ巻号:
- 2000
- 発行年:
- 2000
- ペーパー番号:
- 215C
- 総ページ数:
- 13
- 出版情報:
- New York: American Institute of Chemical Engineers
- 言語:
- 英語
- 請求記号:
- A08000
- 資料種別:
- 国際会議録
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