Development and Testing of a Counterflow let Reactor for Kinetic Studies related to Vapor Phase Synthesis of Electronic Materials
- 著者名:
- Mountziaris, T. J. ( SUNY Buffalo, Buffalo, NY )
- Pawlowski, Roger P. ( SUNY Buffalo, Buffalo, NY )
- Peck, John D ( SUNY Buffalo, Buffalo, NY )
- Sarigiannis, Demetrius ( SUNY Buffalo, Buffalo, NY )
- 掲載資料名:
- AIChE 1998 ANNUAL MEETING
- シリーズ名:
- AIChE meeting [papers]
- シリーズ巻号:
- 1998
- 発行年:
- 1998
- ペーパー番号:
- 210d
- 総ページ数:
- 4
- 出版情報:
- New York: American Institute of Chemical Engineers
- 言語:
- 英語
- 請求記号:
- A08000
- 資料種別:
- 国際会議録
類似資料:
American Institute of Chemical Engineers |
MRS-Materials Research Society |
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
MRS-Materials Research Society |
Materials Research Society |
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
MRS - Materials Research Society |
Materials Research Society |
12
国際会議録
609b. Development of Generalized Design Criteria for Vertical Chemical Vapor Deposition Reactors
American Institute of Chemical Engineers |