Application of Design for Environment Concepts to the Semiconductor Industry

Application of Design for Environment Concepts to the Semiconductor Industry

著者名:

Beu, L. ( Motorola, Austin, TX )
Mendicino, L. ( Motorola, Austin, TX )

掲載資料名:

AIChE NATIONAL MEETING - MARCH 9-13, 1997 - HOUSTON, TX

シリーズ名:

AIChE meeting [papers]

シリーズ巻号:

1997

発行年:

1997

ペーパー番号:

1c

総ページ数:

18

出版情報:

New York: American Institute of Chemical Engineers

言語:

英語

請求記号:

A08000

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015165
シリーズID:	PA00000179
会議名:	AIChE Spring National Meeting
回次:	1997
会議開催地:	Houston, TX, USA
会議開催年:	1997.03.09-1997.03.13
論文注記:	Fiche 30

類似資料:

1 国際会議録 Integrating Environment, Safety and Industrial Hygiene in Semiconductor Process Development Beu, L., Mendicino, L. Electrochemical Society	7 国際会議録 Accommodating Copper Metallization in a Combined Semiconductor Development and Manufacturing Facility Mendicino, L., Brown, P.T. Electrochemical Society
2 国際会議録 Addressing the Environment, Safety and Health Challenges of the 1999 International Technology Roadmap for Semiconductors Mendicino, L., Gibson, S. Electrochemical Society	8 国際会議録 Time-Related Dependability Mechanisms in Guards Beus-Dukic, L., Wellings, A. ESA Publications Division
3 国際会議録 Partnerships to Address EHS Aspects of Chemical Management in the Semiconductor Industry: Lessons from the PFAS Experience Bowden, M., Beu, L., Pawsat, S. Electrochemical Society	9 国際会議録 Criteria for Selection of a COTS Real-Time Operating System: A Survey Beus-Dukic, L. ESA Publications Division
4 国際会議録 Concepts and Application of Risk Management to Address Business Needs Brown, P.T., Trammell, S., Heironimus, J., Mendicino, L. Electrochemical Society	10 国際会議録 Air Monitoring and Odor Elimination in a Semiconductor Photolithography Area Brown, P.T., Villars, M., Sevier, A., Kaczmarik, D., Mendicino, L. Electrochemical Society
5 国際会議録 Energy Conservation Through Water Usage Reduction in the Semiconductor Industry Mendicino, L., McCormack, K., Gibson, S., Patton, B., Lyon, J.D., Covington, J. Electrochemical Society	11 国際会議録 FTIR Analysis of a New High K Gate Material for MOCVD Applications Reid, K., Mendicino, L., Cole, V., Brown, P., Vartanian, V. Electrochemical Society
6 国際会議録 An industry approach to the application of the lysimeter concept Jones, R.L., Parsons, R.G., Gatzweiler, E.W., Wicks, R.J., Leake, C.R. American Chemical Society	12 国際会議録 INVITED: CHINA'S SEMICONDUCTOR INDUSTRY AND THE GLOBAL IC ENVIRONMENT Tu, H. Electrochemical Society

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