Investigation of Reactions of 1,1,1,5,5, 5-Hexafluoro-2,4-Pentanedione (hfac) with Thin Films of CuO and Cu2O

Investigation of Reactions of 1,1,1,5,5, 5-Hexafluoro-2,4-Pentanedione (hfac) with Thin Films of CuO and Cu2O

著者名:

George, M.A. ( Lehigh University, Bethlehem, PA; Air Products and Chemicals, Inc., Allentown, PA; Texas Instruments, Dallas, TX )

Hess, D.W. ( Lehigh University, Bethlehem, PA; Air Products and Chemicals, Inc., Allentown, PA; Texas Instruments, Dallas, TX )

Beck, S.E. ( Lehigh University, Bethlehem, PA; Air Products and Chemicals, Inc., Allentown, PA; Texas Instruments, Dallas, TX )

Ivankovits, J.C. ( Lehigh University, Bethlehem, PA; Air Products and Chemicals, Inc., Allentown, PA; Texas Instruments, Dallas, TX )

Bohling, D.A. ( Lehigh University, Bethlehem, PA; Air Products and Chemicals, Inc., Allentown, PA; Texas Instruments, Dallas, TX )

Felker, B.S. ( Lehigh University, Bethlehem, PA; Air Products and Chemicals, Inc., Allentown, PA; Texas Instruments, Dallas, TX )

Lane, A.P. ( Lehigh University, Bethlehem, PA; Air Products and Chemicals, Inc., Allentown, PA; Texas Instruments, Dallas, TX )

さらに 2 件

掲載資料名:

AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California

シリーズ名:

AIChE meeting [papers]

シリーズ巻号:

1994

発行年:

1994

ペーパー番号:

10c

総ページ数:

6

出版情報:

New York: American Institute of Chemical Engineers

言語:

英語

請求記号:

A08000/950031

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015159
シリーズID:	PA00000179
会議名:	AIChE Annual Meeting
回次:	1994
会議開催地:	San Francisco, CA, USA
会議開催年:	1994.11.13-1994.11.18
論文注記:	Fiche 28

類似資料:

1 国際会議録 REACTION OF 1,1,1,5,5,5,-HEXAFLUORO-2.4-PENTANEDIONE (hfac) WITH SURFACES OF CuO, Cu2O, AND Cu STUDIED BY XPS George, M.A., Hess, D.W., Beck, S.E., Ivankovits, J.C., Bohling, D.A., Felker, B.S., Lane, A.P. Electrochemical Society	7 国際会議録 CHEMICAL VAPOR CLEANING TECHNOLOGiES FOR DRY PROCESSING IN SEMICONDUCTOR MANUFACTURING Beck, S.E., Bohling, D.A., Felker, B.S., George, M.A., Gilicinski, A.G., Ivankovits, J.V., Langan, J.G., Rynders, S.W., … Electrochemical Society
2 国際会議録 REACTION OF 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTANEDIONE (h+hfac) WITH IRON OXIDE THIN FILMS George, M.A., Hess, D.W., Beck, S.E., Young, K.M., Roberts, D.A., Vrtis, R., Voloshin, G., Bobling, D.A., Lane, A.P. Electrochemical Society	8 国際会議録 THE EFFECTS OF CHEMICAL VAPOR CLEANING CHEMISTRIES ON SILICON SURFACES Beck, S. E., Gilicinski, A. G., Felker, B. S., Langan, J. G., Bohling, D. A., George, M. A., Ivankovits, J. C., Rynders, … MRS - Materials Research Society
3 国際会議録 SUB-MONOLAYER IRON AND COPPER REMOVAL BY EXPOSURE TO 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTANEDIONE (H+hfac) Beck, S.E., George, M.A., Young, K.M., Moniot, D.A., Bohling, D.A., Badowski, A.A., Lane, A.P. Electrochemical Society	9 国際会議録 CHEMICAL VAPOR CLEANING OF SODIUM FROM SiO2 Bohling, David A., Felker, Brian S., George, Mark A. Materials Research Society
4 国際会議録 THE EffECTS ON SURFACES OF SILICON AND SILICON DIOXIDE EXPOSED TO 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTA- NEDIONE Beck, S.E., Gilicinski, A.G., Felker, B.S., Langan, J.G., George, M.A., Bohling, D.A., Ivankovits, J.C., Roberts, D.A. Electrochemical Society	10 国際会議録 *INVESTIGATION OF THE HYDROGEN CONTENT OF SILICON IN AN INTEGRATED RAPID THERMAL PROCESSING REACTOR George, M.A., Beck, S.E., Bohling, D.A., Hames, G.A., Wortman, J.J., Melzak, J.A. Materials Research Society
5 国際会議録 The Chemistry of Chemical Vapor Cleaning of Fe With the Chelating Ligand 1,1,1,5,5,5-Hexafluoro-2,4-Pentanedione (H+hfac) George, M. A., Beck, S. E., Moniot, D. A., Young, K. M., Bohling, D. A., Voloshin, G., Hess, D. W. MRS - Materials Research Society	11 国際会議録 DRY SURFACE CLEANING OF PLASMA-ETCHED HEMTs Pearton, S.J., Ren, F., Katz, A., Chakrabarti, U.K., Lane, E., Hobson, W.S., Kopf, R.F., Abernathy, C.R., Wu, C.S., … Materials Research Society
6 国際会議録 VAPOR PHASE CLEANING OF Cu, Fe, AND Na FROM WAPER SURFACES USING 1,1,1,5,5,5-HEXAFLURO-2,4-PENTANEDIONE Beck, S.E., Robertson, E.A., George, M.A., Moniot, D.A., Waskiewicz, J.L., Bohling, D.A., Young, K.M., Badowski, A.A. Electrochemical Society	12 国際会議録 STUDY OF SILICON SURFACE ROUGHNESS BY ATOMIC FORCE MICROSCOPY Gilicinski, Andrew G., Rynders, Rebecca M., Beck, Scott E., Strausser, Yale E., Stets, James R., Felker, Brian S., … MRS - Materials Research Society

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