Supercritical Fluids for Precision Cleaning: Solving Real Problems

Supercritical Fluids for Precision Cleaning: Solving Real Problems

著者名:

Gallagher-Wetmore, P. ( Phasex Corporation )
Wojnarowski, B. ( Process Systems International, Incorporated )
O'Brian, J. ( Process Systems International, Incorporated )

掲載資料名:

AIChE 1993 ANNUAL MEETING - ST. LOUIS, MO - NOV. 7-12, 1993

シリーズ名:

AIChE meeting [papers]

シリーズ巻号:

1993

発行年:

1993

ペーパー番号:

9H

総ページ数:

23

出版情報:

New York: American Institute of Chemical Engineers

言語:

英語

請求記号:

A08000

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015156
シリーズID:	PA00000179
会議名:	AIChE Annual Meeting
回次:	1993
会議開催地:	St. Louis, MO, USA
会議開催年:	1993.11.07-1993.11.12
論文注記:	Fiche 3

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2 国際会議録 Supercritical fluid processing:opportunities for new resist materials and processes Gallagher-Wetmore,P.M., Ober,C.K., Gabor,A.H., Allen,R.D. SPIE-The International Society for Optical Engineering	8 国際会議録 High Resolution Supercritical Fluid Chromatography Jackson, W. P., Richter, B. E., Fjeldsted, J. C., Kong, R. C., Lee, M. L. American Chemical Society
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5 国際会議録 Novel combination of photoactive species:photoresists formed from selectively esterified novolacs and polyfunctional photoactive compounds III,A.T.Jeffries, Brzozowy,D.J., Naiini,A.A., Gallagher-Wetmore,P.M. SPIE-The International Society for Optical Engineering	11 国際会議録 Simulation and Spectroscopy of Solvation in Water from Ambient to Supercritical Conditions Johnston, Keith P., Balbuena, Perla B., Xiang, Tao, Rossky, Peter J. American Chemical Society
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