Application of the Variable Regression Estimation Technique to Chemical Processes Having Unknown Delay.
- 著者名:
- ELNAGGAR, ASHRAF. ( Department of Electrical Engineering,Univ of British Columbia )
- DUMONT, GUY. A. ( Department of Electrical Engineering,Univ of British Columbia )
- ELSHAFEI, ABDEL-LATIF. ( Department of Electrical Engineering,Univ of British Columbia )
- 掲載資料名:
- AIChE ANNUAL MEETING -SAN FRANCISCO, CA. -NOVEMBER 5-10, 1989
- シリーズ名:
- AIChE meeting [papers]
- シリーズ巻号:
- 1989
- 発行年:
- 1989
- ペーパー番号:
- 155f
- 総ページ数:
- 13
- 出版情報:
- New York: American Institute of Chemical Engineers
- 言語:
- 英語
- 請求記号:
- A08000
- 資料種別:
- 国際会議録
類似資料:
American Institute of Chemical Engineers |
American Chemical Society |
Kluwer Academic Publishers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Kluwer Academic Publishers |
4
国際会議録
Process techniques for improving post-exposure delay stability in chemically amplified resists
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |