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THE RECOVERY AND RECYCLING OF HIGH PURITY ARGON IN THE SEMICONDUCTOR INDUSTRY

著者名:
  • O'Brien, J.V. ( Koch Process Systems, Inc. 20 Walkup Drive Westborough, MA 01581 )
  • Schurter, R.V. ( Koch Process Systems, Inc. 20 Walkup Drive Westborough, MA 01581 )
掲載資料名:
AIChE SPRING NATIONAL MTG. -NEW ORLEANS, LA., MARCH 6-10, 1988
シリーズ名:
AIChE meeting [papers]
シリーズ巻号:
1988
発行年:
1988
ペーパー番号:
67c
総ページ数:
19
出版情報:
New York: American Institute of Chemical Engineers
言語:
英語
請求記号:
A08000
資料種別:
国際会議録

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