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A current density distribution approach to the optimisation of RF-MEMS variable capacitors

著者名:
  • Ayoz, S. ( Univ. of Cambridge (United Kingdom) )
  • Tuncer, H. M. ( Univ. of Cambridge (United Kingdom) )
  • Udrea, F. ( Univ. of Cambridge (United Kingdom) )
  • Ionescu, A. ( Ecole Polytechnique Federale de Lausanne (Switzerland) )
  • Fritschi, R. ( Ecole Polytechnique Federale de Lausanne (Switzerland) )
掲載資料名:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5836
発行年:
2005
開始ページ:
527
終了ページ:
534
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458315 [0819458317]
言語:
英語
請求記号:
P63600/5836
資料種別:
国際会議録

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