Model building, control design, and practical implementation of a high precision high dynamical MEMS acceleration sensor (Invited Paper)

著者名:

Wolfram, H. ( Chemnitz Univ. of Technology (Germany) )

Schmiedel, R. ( Chemnitz Univ. of Technology (Germany) )

Hiller, K. ( Chemnitz Univ. of Technology (Germany) )

Aurich, T. ( Gesellschaft fur Mikroelektronikanwendungen Chemnitz m.b.H. (Germany) )

Gunther, W. ( Gesellschaft fur Mikroelektronikanwendungen Chemnitz m.b.H. (Germany) )

Kurth, S. ( Fraunhofer Institute for Reliability and Microintegration (Germany) )

Mehner, J. ( Fraunhofer Institute for Reliability and Microintegration (Germany) )

Dotzel, W. ( Chemnitz Univ. of Technology (Germany) )

GeBner, T. ( Chemnitz Univ. of Technology (Germany) and Fraunhofer Institute for Reliability and Microintegration (Germany) )

さらに 4 件

掲載資料名:

Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5836

発行年:

2005

開始ページ:

326

終了ページ:

340

総ページ数:

15

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458315 [0819458317]

言語:

英語

請求記号:

P63600/5836

資料種別:

国際会議録