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Wafer level optoelectronic device packaging using MEMS (Invited Paper)

著者名:
  • Nallani, A. ( Univ. of Texas at Dallas (USA) and MicroFab Technologies, Inc. (USA) )
  • Chen, T. ( MicroFab Technologies, Inc. (USA) )
  • Lee, J.-B. ( Univ. of Texas at Dallas (USA) )
  • Hayes, D. ( MicroFab Technologies, Inc. (USA) )
  • Wallace, D. ( MicroFab Technologies, Inc. (USA) )
掲載資料名:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5836
発行年:
2005
開始ページ:
116
終了ページ:
127
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458315 [0819458317]
言語:
英語
請求記号:
P63600/5836
資料種別:
国際会議録

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