
Multispectral phase-crossing white-light interferometry
- 著者名:
- Pawlowski, M. E. ( Univ. of Electro-Communications (Japan) )
- Sakano, Y. ( Univ. of Electro-Communications (Japan) )
- Miyamoto, Y. ( Univ. of Electro-Communications (Japan) )
- Takeda, M. ( Univ. of Electro-Communications (Japan) )
- 掲載資料名:
- Eighth International Symposium on Laser Metrology : macro-, micro-, and nano-technologies applied in science, engineering, and industry : 14-18 February, 2005, Merida, Yucatan, Mexico
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5776
- 発行年:
- 2005
- 開始ページ:
- 88
- 終了ページ:
- 93
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457578 [0819457574]
- 言語:
- 英語
- 請求記号:
- P63600/5776
- 資料種別:
- 国際会議録
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