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Failure analysis of MEMS RF cantilevered beam switch

著者名:
Guo, F. ( East China Normal Univ. (China) and Shanghai Institute of Technical Physics, CAS (China) )
Xu, X. ( East China Normal Univ. (China) )
Li, C. ( East China Normal Univ. (China) )
Ge, Y. ( East China Normal Univ. (China) )
Yu, J. ( East China Normal Univ. (China) )
Xin, P. ( East China Normal Univ. (China) )
Zhu, R. ( East China Normal Univ. (China) )
Lai, Z. ( East China Normal Univ. (China) )
Zhu, Z. ( East China Normal Univ. (China) )
Lu, W. ( Shanghai Institute of Technical Physics. CAS (China) )
さらに 5 件
掲載資料名:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5774
発行年:
2004
開始ページ:
506
終了ページ:
509
総ページ数:
4
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
言語:
英語
請求記号:
P63600/5774
資料種別:
国際会議録

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