Failure analysis of MEMS RF cantilevered beam switch
- 著者名:
Guo, F. ( East China Normal Univ. (China) and Shanghai Institute of Technical Physics, CAS (China) ) Xu, X. ( East China Normal Univ. (China) ) Li, C. ( East China Normal Univ. (China) ) Ge, Y. ( East China Normal Univ. (China) ) Yu, J. ( East China Normal Univ. (China) ) Xin, P. ( East China Normal Univ. (China) ) Zhu, R. ( East China Normal Univ. (China) ) Lai, Z. ( East China Normal Univ. (China) ) Zhu, Z. ( East China Normal Univ. (China) ) Lu, W. ( Shanghai Institute of Technical Physics. CAS (China) ) - 掲載資料名:
- Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5774
- 発行年:
- 2004
- 開始ページ:
- 506
- 終了ページ:
- 509
- 総ページ数:
- 4
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457554 [0819457558]
- 言語:
- 英語
- 請求記号:
- P63600/5774
- 資料種別:
- 国際会議録
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