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Deposition of microcrystalline silicon thin films for solar cells by VHF-PECVD

著者名:
Zhang, X. ( Nankai Univ. (China) )
Zhao, Y. ( Nankai Univ. (China) )
Zhu, F. ( Nankai Univ. (China) )
Mai, Y. ( Nankai Univ. (China) )
Wei, C. ( Nankai Univ. (China) )
Gao, Y. ( Nankai Univ. (China) )
Hou, G. ( Nankai Univ. (China) )
Sun, J. ( Nankai Univ. (China) )
Li, J. ( Nankai Univ. (China) )
Geng, X. ( Nankai Univ. (China) )
Xiong, S. ( Nankai Univ. (China) )
さらに 6 件
掲載資料名:
Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5774
発行年:
2004
開始ページ:
426
終了ページ:
429
総ページ数:
4
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457554 [0819457558]
言語:
英語
請求記号:
P63600/5774
資料種別:
国際会議録

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