The nanostructures and optical properties of ZnO films by RF magnetron sputtering

The nanostructures and optical properties of ZnO films by RF magnetron sputtering

著者名:

Huang, B. ( Xiamen Univ. (China) )
Wu, S. ( Xiamen Univ. (China) )
Li, J. ( Xiamen Univ. (China) )
Sun, S. ( Xiamen Univ. (China) )
Tian, Z. ( Xiamen Univ. (China) )

掲載資料名:

Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5774

発行年:

2004

開始ページ:

152

終了ページ:

155

総ページ数:

4

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457554 [0819457558]

言語:

英語

請求記号:

P63600/5774

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015002
シリーズID:	PA00000029
会議名:	International Conference on Thin Film Physics and Applications
回次:	2004 : 5th
会議開催地:	Shanghai, China
会議開催年:	2004.05.31-2004.06.02

類似資料:

1 国際会議録 Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering Y.-B. Wu, B. Huang, L.-T. Zhang, J. Li, S.-T. Wu Society of Photo-optical Instrumentation Engineers	7 国際会議録 The Optical and Crystalline Structure Properties of ZnO Thin Films Grown by RF Magnetron Sputtering Kim, K. K., Park, S. J., Song, J. H., Song, J-H., Jung, H-J., Choi, W. K. MRS - Materials Research Society
2 国際会議録 Effect of annealing temperature on the structural and optical properties of Al-doped ZnO films by RF magnetron sputtering Y. Wu, B. Huang, L. Zhang, S. Wu Society of Photo-optical Instrumentation Engineers	8 国際会議録 The structural and electrochemical properties of tin oxide films prepared by RF magnetron sputtering M. Cai, J. Song, L. Zhang, Q. Wu, S. Wu Society of Photo-optical Instrumentation Engineers
3 国際会議録 Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering Y.B. Wu, S. Lei, Z. Wang, R.H. Zhao, L. Huang Trans Tech Publications	9 国際会議録 Vanadium oxide thin films prepared by RF magnetron sputtering method Li, Z., Wu, S., Li, J., Guo, D., Xu, F. SPIE - The International Society of Optical Engineering
4 国際会議録 The properties of ZnO thin films fabricated by ion beam sputtering and RF magnetron sputtering X. X. He, H. Q. Li, J. B. Gu, S. B. Wu, B. Cao Society of Photo-optical Instrumentation Engineers	10 国際会議録 Growth Conditions Effect on the Structure and Optical Properties of ZnO Thin Films Synthesized by rf magnetron Sputtering Luis Angelats-Silva, Maharaj S. Tomar, Oscar Perales-Perez, Segundo R. Jauregui-Rosas, S. P. Singh Materials Research Society
5 国際会議録 Investigation of Optical Properties of ZnO Films Deposited by RF Magnetron Sputtering S. Li, F.X. Wang, G. Fu, Y.J. Ji, J.Q. Zhao Trans Tech Publications	11 国際会議録 Structure and Optical Properties of ZnO Thin Film Preparation Using RF Magnetron Sputtering S.Y. Quan, L.M. Yang, C. Liu, X.D. Zhang Trans Tech Publications
6 国際会議録 Influence of Substrate Temperature on the Al and Zr Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering F. Huan, J.F. Leng, Z.C. Meng, B. Sun, W.S. He Trans Tech Publications	12 国際会議録 Effects of Power on Properties of ZnO:Al Films Deposited on Flexible Substrates by RF Magnetron Sputtering X.J. Wang, Q.S. Lei, J.M. Yuan, W.L. Zhou, J. Yu Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12