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Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM

著者名:
Kitamura, T. ( NanoGeometry Research Inc. (Japan) )
Kubota, K. ( NanoGeometry Research Inc. (Japan) )
Hasebe, T. ( NanoGeometry Research Inc. (Japan) )
Sakai, F. ( NanoGeometry Research Inc. (Japan) )
Nakazawa, S. ( NanoGeometry Research Inc. (Japan) )
Vohra, N. ( NanoGeometry Research Inc. (Japan) )
Yamamoto, M. ( NanoGeometry Research Inc. (Japan) )
Inoue, M. ( Topcon Corp. (Japan) )
さらに 3 件
掲載資料名:
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5756
発行年:
2005
開始ページ:
73
終了ページ:
84
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457363 [0819457361]
言語:
英語
請求記号:
P63600/5756
資料種別:
国際会議録

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