Blank Cover Image

A high-frame-rate DUV-optimized CCD for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high NA imaging systems

著者名:
  • Yim, D. ( Hynix Semiconductor Inc. (South Korea) )
  • Yang, H. ( Hynix Semiconductor Inc. (South Korea) )
  • Park, C. ( Hynix Semiconductor Inc. (South Korea) )
  • Hong, J. ( Hynix Semiconductor Inc. (South Korea) )
  • Choi, J. ( Hynix Semiconductor Inc. (South Korea) )
掲載資料名:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5754
発行年:
2005
パート:
1
開始ページ:
107
終了ページ:
118
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819457349 [0819457345]
言語:
英語
請求記号:
P63600/5754
資料種別:
国際会議録

類似資料:

1 国際会議録 Characteristics analysis of polarization module on optical proximity effect

C. Park, J. Hong, K. Yang, T. Theeuwes, F. Gautier, Y. Min, A. Chen, H. Yang, D. Yim, J. Kim

SPIE - The International Society of Optical Engineering
7 国際会議録 High NA polarized light lithography for O.29kl process [6154-15]

Park, C., Lee, J., Yang, K., Tseng, S., Min, Y.-H, Yang, H., Yim, D., Kim, J.

SPIE - The International Society of Optical Engineering
2 国際会議録 DFM flow by using combination between design based metrology system and model based verification at sub-50nm memory device

C. Kim, J. Kim, J. Choi, H. Yang, D. Yim

SPIE - The International Society of Optical Engineering
8 国際会議録 Implementation of nationwide image sharing system

Choi, S.W., Sim, J., Ko, W., Park, C.H., Lee, J., Lim, D.H., Han, J., Hong, H.P., Choi, B.

SPIE-The International Society for Optical Engineering
3 国際会議録 OPC accuracy and process window verification methodology for sub-100-nm node

Yang, H., Park, C., Hong, J., Jeong, G., Cho, B., Choi, J., Kang, C., Yang, K., Kang, E., Ji, S., Yim, D., Song, Y.

SPIE - The International Society of Optical Engineering
9 国際会議録 CD control at low K1 optical lithography in DRAM device

Hong, J., Woo, C., Park, J., Cho, B., Choi, J.-S., Yang, H., Park, C., Shin, Y.-C., Kim, Y., Jeong, G., Kim, J., Kang, …

SPIE-The International Society for Optical Engineering
4 国際会議録 Development of high frame rate CCD image remote acquisition system

H. Zhang, B. Li, L. Ruan, B. Feng, M. Guo

SPIE - The International Society of Optical Engineering
10 国際会議録 New OPC verification method using die-to-database inspection [6152-119]

Yang, H., Choi, J., Cho, B, Hong, J., Song, J., Yim, D., Kim, J., Yamamoto. M.

SPIE - The International Society of Optical Engineering
5 国際会議録 How to obtain accurate resist simulations in very low-kl era- [6154-107]

Chiou T. B, Park C. H, Choi, J. S, Min Y.-H, Hansen S, Tseng S. E, Chen A C, Yim D

SPIE - The International Society of Optical Engineering
11 国際会議録 A measurement system based on visual servoing and error correction method using multiple CCD camera module and structured target for three dimensional …

D.-K. Noh, S.-H. Kim, Y.-J. Park, D. J. Choi

Society of Photo-optical Instrumentation Engineers
6 国際会議録 Processing of multiport CCD video signals at very high frame rates

B.T. Turko, G.J. Yates, N.S.P. King

Society of Photo-optical Instrumentation Engineers
12 国際会議録 Simultaneous intensity birefringence, and flow measurements using high-speed fiber-based optical coherence tomography

Pierce, M.C., Park, B.H., Cense, B., Shishkov, M.S., Boer, J.F.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12